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Key Type Value Description
Operator’s Manual LBA-PC
Doc. No. 10654-001, Rev 4.10
239
0 to 1e12.
GaussDeviationMinorMax F Gauss Deviation Minor, or
Gauss Deviation Y; maximum.
0 to 1e12.
A.5.3.5 pass/fail top hat configuration
Key Type Value Description
TophatFluence B,B Min,Max test enable.
TophatFluenceMin F Tophat Fluence, or
Tophat Fluence X; minimum.
-1e12 to 1e12.
TophatFluenceMax F Tophat Fluence, or
Tophat Fluence X; maximum.
-1e12 to 1e12.
TophatMean B,B Min,Max test enable.
TophatMeanMin F Tophat Mean, or
Tophat Mean X; minimum.
-1e12 to 1e12.
TophatMeanMax F Tophat Mean, or
Tophat Mean X; maximum.
-1e12 to 1e12.
TophatDeviation B,B Min,Max test enable.
TophatDeviationMin F Tophat Deviation, or
Tophat Deviation X; minimum.
-1e12 to 1e12.
TophatDeviationMax F Tophat Deviation, or
Tophat Deviation X; maximum.
-1e12 to 1e12.
TophatSDM B,B Min,Max test enable.
TophatSDMMin F Tophat SD/M, or
Tophat SD/M X; minimum.
0 to 1e3.